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THULIR VACUUM TECHNOLOGIES
GST : 33APQPR6798P1ZI

Vacuum Measuring Instruments

Vacuum Chamber Accessories

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Diffusion Pump

Air Cooled Diffusion Pump

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Cylindrical Vacuum Chamber

Multi Tube Joint Adapter

Multi Tube Joint Adapter

RF Magnetron Sputtering System

RF Magnetron Sputtering System

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Dosing Pump Maintenance Service

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Vacuum Coating Chamber

Moisture Trap

Sputtering Turbo and Diffusion Coating Unit

Sputtering Turbo and Diffusion Coating Unit Specification

Equipment Type
Sputtering Turbo & Diffusion Coating Unit

Material
Stainless Steel, High-Purity Ceramic, Quartz Glass

Processing Type
Physical Vapor Deposition (PVD)

Condition
New

Technology
Sputtering (Turbo), Diffusion Coating

Dimension (L*W*H)
1700 x 900 x 1800 mm

Power Mode
Electric

Voltage
220V/380V, 50/60 Hz

Power Consumption
2-5 kW

Pressure Output
Up to 1 x 10 mbar (Turbo), 1 x 10 mbar (Diffusion)

Application
Semiconductor, Optoelectronics, Solar Cells, Thin Film Deposition

Coating Type
Metal, Oxide, Nitride, Custom Thin Films

Accessories
Target Holders, Substrate Holders, Gas Lines, Turbo Pumps, Diffusion Pumps, Vacuum Gauges

Substrate Heating
Up to 400C

Gas Feed System
Mass flow controllers for precise gas mixing

Chamber Material
High-grade vacuum welded stainless steel

Cooling System
Water-cooled substrate and targets

Pump Down Time
Less than 15 minutes to base pressure

Target Change Mechanism
Quick access, manual/auto option

Safety Interlocks
Over-pressure, temperature, and water flow protections

Deposition Uniformity
5% across 150 mm substrate

Noise Level
< 60 dB during operation

Control Interface
Digital touch panel display

Vacuum Level
Up to 1 x 10 mbar attainable

Max Substrate Size
200 mm diameter

Film Thickness Monitor
Quartz crystal microbalance

Process Recipes Storage
Up to 100 programmable recipes

Installation Type
Floor-standing, ported for exhaust

Sputtering Turbo and Diffusion Coating Unit Trade Information

Minimum Order Quantity
1 Unit

Supply Ability
1 Unit Per Week

Delivery Time
1 Week

Main Domestic Market
Andhra Pradesh, Karnataka, Kerala, Pondicherry, Telangana, South India, Tamil Nadu

About Sputtering Turbo and Diffusion Coating Unit

Limited stock available: Secure this must-have Sputtering Turbo and Diffusion Coating Unit, designed for unparalleled performance in thin film deposition. Procure best-in-class technology featuring a high-grade vacuum welded stainless steel chamber and water-cooled substrate/targets, supporting up to 200 mm substrates. Benefit from perfect digital touch panel control, rapid pump down time under 15 minutes, and 5% deposition uniformity. Equipped with mass flow controllers, advanced safety interlocks, and up to 100 programmable recipes, this unit delivers precise and reliable coatings. Floor-standing and ported for exhaust, its ideal for semiconductor and optoelectronics applications.

Special Features and Application Versatility

Experience technology at its finest with water-cooled substrates, rapid pump down, and precise film thickness monitoring via quartz crystal microbalance. The units quick target change mechanism and digital interface support versatile usage in semiconductor manufacturing, solar cell fabrication, and advanced optoelectronics. Suited for research labs and large-scale production, this system delivers consistent, high-quality thin films such as metal, oxide, nitride, and custom materials with exceptional ease.

Certifications, Payment, and Port Details

Our Sputtering Turbo and Diffusion Coating Unit complies with recognized industry certifications, ensuring top-tier reliability and safety. We offer flexible payment terms to help suit your procurement planning. Packing & dispatch are managed meticulously for secure freight handling, with delivery options available FOB from major Indian ports. Each unit is professionally packed and shipped to guarantee pristine condition upon arrival, optimizing investment value and operational readiness.

FAQs of Sputtering Turbo and Diffusion Coating Unit:

Q: How does the cooling system in the Sputtering Turbo and Diffusion Coating Unit operate?

A: The cooling system uses a water-cooled mechanism to maintain optimal temperatures for both substrates and targets throughout the deposition process, ensuring stability and superior thin film quality.

Q: What applications are ideal for this coating unit?

A: This equipment is perfect for semiconductor processes, optoelectronics, solar cell fabrication, and any thin film deposition tasks demanding high uniformity and precision.

Q: Where can the equipment be installed?

A: The unit is designed for floor-standing installation and is ported for exhaust, making it suitable for research laboratories, industrial production lines, and cleanroom environments.

Q: What safety features does the coating unit provide?

A: Safety interlocks guard against over-pressure, excessive temperature, and water flow interruptions, safeguarding both operators and equipment during operation.

Q: How does the quick target change mechanism benefit users?

A: It offers manual or automatic options for fast target replacement, minimizing downtime and enhancing productivity during process changes.

Q: What payment and shipping options are available?

A: We provide flexible payment terms and ensure careful freight packing & dispatch, with shipment available FOB from key Indian ports to facilitate smooth, global delivery.

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